9/3/2010	9:16:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	9:16:39 AM	Recipe started at 9:16 AM
9/3/2010	9:16:39 AM	Helium valve closed
9/3/2010	9:16:39 AM	H2 valve closed
9/3/2010	9:16:40 AM	BCl3 valve closed
9/3/2010	9:16:40 AM	PH3 valve closed
9/3/2010	9:16:40 AM	SiCl4 pre valve closed
9/3/2010	9:16:40 AM	SiCl4 post valve closed
9/3/2010	9:16:40 AM	Main Vac valve closed
9/3/2010	9:16:40 AM	Bubbler valve closed
9/3/2010	9:16:40 AM	Bypass valve opened
9/3/2010	9:16:40 AM	Helium MFC set to  0.000000
9/3/2010	9:16:40 AM	H2 MFC set to  0.000000
9/3/2010	9:16:40 AM	BCl3 MFC set to  0.000000
9/3/2010	9:16:40 AM	PHl3 MFC set to  0.000000
9/3/2010	9:16:40 AM	SiCl4 MFC set to  0.000000
9/3/2010	9:16:40 AM	Bypass solenoid MFC set to  0.000000
9/3/2010	9:16:40 AM	Tube furnace set to 0
9/3/2010	9:17:19 AM	Helium valve closed
9/3/2010	9:17:19 AM	H2 valve closed
9/3/2010	9:17:19 AM	BCl3 valve closed
9/3/2010	9:17:19 AM	PH3 valve closed
9/3/2010	9:17:19 AM	SiCl4 pre valve closed
9/3/2010	9:17:19 AM	SiCl4 post valve closed
9/3/2010	9:17:19 AM	Bubbler valve closed
9/3/2010	9:17:19 AM	Main Vac valve opened
9/3/2010	9:17:19 AM	Bypass valve opened
9/3/2010	9:17:19 AM	Helium MFC set to  0.000000
9/3/2010	9:17:19 AM	H2 MFC set to  0.000000
9/3/2010	9:17:19 AM	BCl3 MFC set to  0.000000
9/3/2010	9:17:19 AM	PHl3 MFC set to  0.000000
9/3/2010	9:17:19 AM	SiCl4 MFC set to  0.000000
9/3/2010	9:17:19 AM	Bypass solenoid MFC set to  0.000000
9/3/2010	9:17:20 AM	Tube furnace set to 0
9/3/2010	9:17:20 AM	Run finished at 9:17 AM
9/3/2010	9:17:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	2:00:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/3/2010	2:00:09 PM	Recipe started at 2:00 PM
9/3/2010	2:00:09 PM	H2 valve closed
9/3/2010	2:00:09 PM	BCl3 valve closed
9/3/2010	2:00:09 PM	PH3 valve closed
9/3/2010	2:00:09 PM	SiCl4 pre valve closed
9/3/2010	2:00:09 PM	SiCl4 post valve closed
9/3/2010	2:00:09 PM	Main Vac valve closed
9/3/2010	2:00:09 PM	Bypass valve closed
9/3/2010	2:00:09 PM	Bubbler valve closed
9/3/2010	2:00:09 PM	Helium valve opened
9/3/2010	2:00:09 PM	Helium MFC set to  500.000000
9/3/2010	2:00:09 PM	H2 MFC set to  0.000000
9/3/2010	2:00:09 PM	BCl3 MFC set to  0.000000
9/3/2010	2:00:09 PM	PHl3 MFC set to  0.000000
9/3/2010	2:00:09 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:00:09 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:00:10 PM	Tube furnace set to 0
9/3/2010	2:01:29 PM	Helium valve closed
9/3/2010	2:01:29 PM	H2 valve closed
9/3/2010	2:01:29 PM	BCl3 valve closed
9/3/2010	2:01:29 PM	PH3 valve closed
9/3/2010	2:01:29 PM	SiCl4 pre valve closed
9/3/2010	2:01:29 PM	SiCl4 post valve closed
9/3/2010	2:01:29 PM	Main Vac valve closed
9/3/2010	2:01:29 PM	Bypass valve closed
9/3/2010	2:01:29 PM	Bubbler valve closed
9/3/2010	2:01:29 PM	Helium MFC set to  0.000000
9/3/2010	2:01:29 PM	H2 MFC set to  0.000000
9/3/2010	2:01:29 PM	BCl3 MFC set to  0.000000
9/3/2010	2:01:29 PM	PHl3 MFC set to  0.000000
9/3/2010	2:01:29 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:01:29 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:01:29 PM	Tube furnace set to 0
9/3/2010	2:01:29 PM	Run finished at 2:01 PM
9/3/2010	2:01:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/3/2010	2:13:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	2:13:50 PM	Recipe started at 2:13 PM
9/3/2010	2:13:50 PM	Helium valve closed
9/3/2010	2:13:50 PM	H2 valve closed
9/3/2010	2:13:50 PM	BCl3 valve closed
9/3/2010	2:13:50 PM	PH3 valve closed
9/3/2010	2:13:50 PM	SiCl4 pre valve closed
9/3/2010	2:13:50 PM	SiCl4 post valve closed
9/3/2010	2:13:50 PM	Main Vac valve closed
9/3/2010	2:13:50 PM	Bubbler valve closed
9/3/2010	2:13:50 PM	Bypass valve opened
9/3/2010	2:13:50 PM	Helium MFC set to  0.000000
9/3/2010	2:13:50 PM	H2 MFC set to  0.000000
9/3/2010	2:13:50 PM	BCl3 MFC set to  0.000000
9/3/2010	2:13:50 PM	PHl3 MFC set to  0.000000
9/3/2010	2:13:50 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:13:50 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:13:50 PM	Tube furnace set to 0
9/3/2010	2:14:28 PM	Helium valve closed
9/3/2010	2:14:28 PM	H2 valve closed
9/3/2010	2:14:28 PM	BCl3 valve closed
9/3/2010	2:14:28 PM	PH3 valve closed
9/3/2010	2:14:28 PM	SiCl4 pre valve closed
9/3/2010	2:14:28 PM	SiCl4 post valve closed
9/3/2010	2:14:28 PM	Bubbler valve closed
9/3/2010	2:14:28 PM	Main Vac valve opened
9/3/2010	2:14:28 PM	Bypass valve opened
9/3/2010	2:14:28 PM	Helium MFC set to  0.000000
9/3/2010	2:14:28 PM	H2 MFC set to  0.000000
9/3/2010	2:14:28 PM	BCl3 MFC set to  0.000000
9/3/2010	2:14:28 PM	PHl3 MFC set to  0.000000
9/3/2010	2:14:28 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:14:28 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:14:28 PM	Tube furnace set to 0
9/3/2010	2:14:28 PM	Run finished at 2:14 PM
9/3/2010	2:14:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	2:25:33 PM	Helium MFC set to  100.000000
9/3/2010	2:25:34 PM	Helium valve opened
9/3/2010	2:30:33 PM	Recipe started at 2:30 PM
9/3/2010	2:30:33 PM	Helium valve closed
9/3/2010	2:30:33 PM	H2 valve closed
9/3/2010	2:30:33 PM	BCl3 valve closed
9/3/2010	2:30:33 PM	PH3 valve closed
9/3/2010	2:30:33 PM	SiCl4 pre valve closed
9/3/2010	2:30:33 PM	SiCl4 post valve closed
9/3/2010	2:30:33 PM	Main Vac valve closed
9/3/2010	2:30:33 PM	Bubbler valve closed
9/3/2010	2:30:33 PM	Bypass valve opened
9/3/2010	2:30:33 PM	Helium MFC set to  0.000000
9/3/2010	2:30:33 PM	H2 MFC set to  0.000000
9/3/2010	2:30:33 PM	BCl3 MFC set to  0.000000
9/3/2010	2:30:33 PM	PHl3 MFC set to  0.000000
9/3/2010	2:30:33 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:30:33 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:30:33 PM	Tube furnace set to 100
9/3/2010	2:30:33 PM	Helium valve closed
9/3/2010	2:30:33 PM	H2 valve closed
9/3/2010	2:30:33 PM	BCl3 valve closed
9/3/2010	2:30:33 PM	PH3 valve closed
9/3/2010	2:30:33 PM	SiCl4 pre valve closed
9/3/2010	2:30:33 PM	SiCl4 post valve closed
9/3/2010	2:30:33 PM	Bubbler valve closed
9/3/2010	2:30:33 PM	Main Vac valve opened
9/3/2010	2:30:33 PM	Bypass valve opened
9/3/2010	2:30:33 PM	Helium MFC set to  0.000000
9/3/2010	2:30:33 PM	H2 MFC set to  0.000000
9/3/2010	2:30:33 PM	BCl3 MFC set to  0.000000
9/3/2010	2:30:33 PM	PHl3 MFC set to  0.000000
9/3/2010	2:30:33 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:30:33 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:30:33 PM	Tube furnace set to 100
9/3/2010	2:31:33 PM	H2 valve closed
9/3/2010	2:31:33 PM	BCl3 valve closed
9/3/2010	2:31:33 PM	PH3 valve closed
9/3/2010	2:31:33 PM	SiCl4 pre valve closed
9/3/2010	2:31:33 PM	SiCl4 post valve closed
9/3/2010	2:31:33 PM	Bubbler valve closed
9/3/2010	2:31:33 PM	Helium valve opened
9/3/2010	2:31:33 PM	Main Vac valve opened
9/3/2010	2:31:33 PM	Bypass valve opened
9/3/2010	2:31:33 PM	Helium MFC set to  100.000000
9/3/2010	2:31:33 PM	H2 MFC set to  0.000000
9/3/2010	2:31:33 PM	BCl3 MFC set to  0.000000
9/3/2010	2:31:33 PM	PHl3 MFC set to  0.000000
9/3/2010	2:31:33 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:31:33 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:31:34 PM	Tube furnace set to 100
9/3/2010	2:39:33 PM	Helium valve closed
9/3/2010	2:39:33 PM	H2 valve closed
9/3/2010	2:39:33 PM	BCl3 valve closed
9/3/2010	2:39:33 PM	PH3 valve closed
9/3/2010	2:39:33 PM	SiCl4 pre valve closed
9/3/2010	2:39:33 PM	SiCl4 post valve closed
9/3/2010	2:39:33 PM	Bubbler valve closed
9/3/2010	2:39:33 PM	Main Vac valve opened
9/3/2010	2:39:33 PM	Bypass valve opened
9/3/2010	2:39:33 PM	Helium MFC set to  0.000000
9/3/2010	2:39:33 PM	H2 MFC set to  0.000000
9/3/2010	2:39:33 PM	BCl3 MFC set to  0.000000
9/3/2010	2:39:33 PM	PHl3 MFC set to  0.000000
9/3/2010	2:39:33 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:39:33 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:39:33 PM	Tube furnace set to 100
9/3/2010	2:40:13 PM	Run aborted at 2:40 PM
9/3/2010	2:40:13 PM	Helium valve closed
9/3/2010	2:40:13 PM	H2 valve closed
9/3/2010	2:40:13 PM	BCl3 valve closed
9/3/2010	2:40:13 PM	PH3 valve closed
9/3/2010	2:40:13 PM	SiCl4 pre valve closed
9/3/2010	2:40:13 PM	SiCl4 post valve closed
9/3/2010	2:40:13 PM	Bypass valve closed
9/3/2010	2:40:13 PM	Main Vac valve closed
9/3/2010	2:40:13 PM	Bubbler valve closed
9/3/2010	2:40:13 PM	Helium MFC set to  0.000000
9/3/2010	2:40:13 PM	H2 MFC set to  0.000000
9/3/2010	2:40:13 PM	BCl3 MFC set to  0.000000
9/3/2010	2:40:13 PM	PHl3 MFC set to  0.000000
9/3/2010	2:40:13 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:40:13 PM	Tube furnace set to 0
9/3/2010	2:40:18 PM	Recipe started at 2:40 PM
9/3/2010	2:40:18 PM	Helium valve closed
9/3/2010	2:40:18 PM	H2 valve closed
9/3/2010	2:40:18 PM	BCl3 valve closed
9/3/2010	2:40:18 PM	PH3 valve closed
9/3/2010	2:40:18 PM	SiCl4 pre valve closed
9/3/2010	2:40:18 PM	SiCl4 post valve closed
9/3/2010	2:40:18 PM	Main Vac valve closed
9/3/2010	2:40:18 PM	Bubbler valve closed
9/3/2010	2:40:18 PM	Bypass valve opened
9/3/2010	2:40:18 PM	Helium MFC set to  0.000000
9/3/2010	2:40:18 PM	H2 MFC set to  0.000000
9/3/2010	2:40:18 PM	BCl3 MFC set to  0.000000
9/3/2010	2:40:18 PM	PHl3 MFC set to  0.000000
9/3/2010	2:40:18 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:40:18 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:40:18 PM	Tube furnace set to 100
9/3/2010	2:40:19 PM	Helium valve closed
9/3/2010	2:40:19 PM	H2 valve closed
9/3/2010	2:40:19 PM	BCl3 valve closed
9/3/2010	2:40:19 PM	PH3 valve closed
9/3/2010	2:40:19 PM	SiCl4 pre valve closed
9/3/2010	2:40:19 PM	SiCl4 post valve closed
9/3/2010	2:40:19 PM	Bubbler valve closed
9/3/2010	2:40:19 PM	Main Vac valve opened
9/3/2010	2:40:19 PM	Bypass valve opened
9/3/2010	2:40:19 PM	Helium MFC set to  0.000000
9/3/2010	2:40:19 PM	H2 MFC set to  0.000000
9/3/2010	2:40:19 PM	BCl3 MFC set to  0.000000
9/3/2010	2:40:19 PM	PHl3 MFC set to  0.000000
9/3/2010	2:40:19 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:40:19 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:40:19 PM	Tube furnace set to 100
9/3/2010	2:41:19 PM	H2 valve closed
9/3/2010	2:41:19 PM	BCl3 valve closed
9/3/2010	2:41:19 PM	PH3 valve closed
9/3/2010	2:41:19 PM	SiCl4 pre valve closed
9/3/2010	2:41:19 PM	SiCl4 post valve closed
9/3/2010	2:41:19 PM	Bubbler valve closed
9/3/2010	2:41:19 PM	Helium valve opened
9/3/2010	2:41:19 PM	Main Vac valve opened
9/3/2010	2:41:19 PM	Bypass valve opened
9/3/2010	2:41:19 PM	Helium MFC set to  100.000000
9/3/2010	2:41:19 PM	H2 MFC set to  0.000000
9/3/2010	2:41:19 PM	BCl3 MFC set to  0.000000
9/3/2010	2:41:19 PM	PHl3 MFC set to  0.000000
9/3/2010	2:41:19 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:41:19 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:41:19 PM	Tube furnace set to 100
9/3/2010	2:50:19 PM	Helium valve closed
9/3/2010	2:50:19 PM	H2 valve closed
9/3/2010	2:50:19 PM	BCl3 valve closed
9/3/2010	2:50:19 PM	PH3 valve closed
9/3/2010	2:50:19 PM	SiCl4 pre valve closed
9/3/2010	2:50:19 PM	SiCl4 post valve closed
9/3/2010	2:50:19 PM	Bubbler valve closed
9/3/2010	2:50:19 PM	Main Vac valve opened
9/3/2010	2:50:19 PM	Bypass valve opened
9/3/2010	2:50:19 PM	Helium MFC set to  0.000000
9/3/2010	2:50:19 PM	H2 MFC set to  0.000000
9/3/2010	2:50:19 PM	BCl3 MFC set to  0.000000
9/3/2010	2:50:19 PM	PHl3 MFC set to  0.000000
9/3/2010	2:50:19 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:50:19 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:50:19 PM	Tube furnace set to 100
9/3/2010	2:51:19 PM	H2 valve closed
9/3/2010	2:51:19 PM	BCl3 valve closed
9/3/2010	2:51:19 PM	PH3 valve closed
9/3/2010	2:51:19 PM	SiCl4 pre valve closed
9/3/2010	2:51:19 PM	SiCl4 post valve closed
9/3/2010	2:51:19 PM	Bubbler valve closed
9/3/2010	2:51:19 PM	Helium valve opened
9/3/2010	2:51:19 PM	Main Vac valve opened
9/3/2010	2:51:19 PM	Bypass valve opened
9/3/2010	2:51:19 PM	Helium MFC set to  100.000000
9/3/2010	2:51:19 PM	H2 MFC set to  0.000000
9/3/2010	2:51:19 PM	BCl3 MFC set to  0.000000
9/3/2010	2:51:19 PM	PHl3 MFC set to  0.000000
9/3/2010	2:51:19 PM	SiCl4 MFC set to  0.000000
9/3/2010	2:51:19 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	2:51:19 PM	Tube furnace set to 100
9/3/2010	3:00:19 PM	Helium valve closed
9/3/2010	3:00:19 PM	H2 valve closed
9/3/2010	3:00:19 PM	BCl3 valve closed
9/3/2010	3:00:19 PM	PH3 valve closed
9/3/2010	3:00:19 PM	SiCl4 pre valve closed
9/3/2010	3:00:19 PM	SiCl4 post valve closed
9/3/2010	3:00:19 PM	Bubbler valve closed
9/3/2010	3:00:19 PM	Main Vac valve opened
9/3/2010	3:00:19 PM	Bypass valve opened
9/3/2010	3:00:19 PM	Helium MFC set to  0.000000
9/3/2010	3:00:19 PM	H2 MFC set to  0.000000
9/3/2010	3:00:19 PM	BCl3 MFC set to  0.000000
9/3/2010	3:00:19 PM	PHl3 MFC set to  0.000000
9/3/2010	3:00:19 PM	SiCl4 MFC set to  0.000000
9/3/2010	3:00:19 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	3:00:20 PM	Tube furnace set to 100
9/3/2010	3:01:20 PM	H2 valve closed
9/3/2010	3:01:20 PM	BCl3 valve closed
9/3/2010	3:01:20 PM	PH3 valve closed
9/3/2010	3:01:20 PM	SiCl4 pre valve closed
9/3/2010	3:01:20 PM	SiCl4 post valve closed
9/3/2010	3:01:20 PM	Bubbler valve closed
9/3/2010	3:01:20 PM	Helium valve opened
9/3/2010	3:01:20 PM	Main Vac valve opened
9/3/2010	3:01:20 PM	Bypass valve opened
9/3/2010	3:01:20 PM	Helium MFC set to  100.000000
9/3/2010	3:01:20 PM	H2 MFC set to  0.000000
9/3/2010	3:01:20 PM	BCl3 MFC set to  0.000000
9/3/2010	3:01:20 PM	PHl3 MFC set to  0.000000
9/3/2010	3:01:20 PM	SiCl4 MFC set to  0.000000
9/3/2010	3:01:20 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	3:01:20 PM	Tube furnace set to 100
9/3/2010	3:10:20 PM	Helium valve closed
9/3/2010	3:10:20 PM	H2 valve closed
9/3/2010	3:10:20 PM	BCl3 valve closed
9/3/2010	3:10:20 PM	PH3 valve closed
9/3/2010	3:10:20 PM	SiCl4 pre valve closed
9/3/2010	3:10:20 PM	SiCl4 post valve closed
9/3/2010	3:10:20 PM	Bubbler valve closed
9/3/2010	3:10:20 PM	Main Vac valve opened
9/3/2010	3:10:20 PM	Bypass valve opened
9/3/2010	3:10:20 PM	Helium MFC set to  0.000000
9/3/2010	3:10:20 PM	H2 MFC set to  0.000000
9/3/2010	3:10:20 PM	BCl3 MFC set to  0.000000
9/3/2010	3:10:20 PM	PHl3 MFC set to  0.000000
9/3/2010	3:10:20 PM	SiCl4 MFC set to  0.000000
9/3/2010	3:10:20 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	3:10:20 PM	Tube furnace set to 100
9/3/2010	3:10:21 PM	Run finished at 3:10 PM
9/3/2010	3:29:42 PM	Helium valve opened
9/3/2010	3:29:44 PM	Helium MFC set to  100.000000
9/3/2010	3:33:43 PM	Helium MFC set to  100.000000
9/3/2010	3:33:43 PM	Helium valve closed
9/3/2010	3:34:42 PM	Helium valve opened
9/3/2010	3:35:52 PM	Helium valve closed
9/3/2010	3:36:54 PM	Helium valve opened
9/3/2010	3:36:59 PM	Helium valve closed
9/3/2010	3:37:41 PM	Bypass valve closed
9/3/2010	3:37:41 PM	Main Vac valve closed
9/3/2010	3:37:59 PM	Bypass valve opened
9/3/2010	3:38:00 PM	Main Vac valve opened
9/3/2010	3:38:02 PM	Helium valve opened
9/3/2010	3:38:17 PM	Helium valve closed
9/3/2010	3:39:04 PM	Recipe started at 3:39 PM
9/3/2010	3:39:04 PM	Helium valve closed
9/3/2010	3:39:04 PM	BCl3 valve closed
9/3/2010	3:39:04 PM	PH3 valve closed
9/3/2010	3:39:04 PM	SiCl4 pre valve closed
9/3/2010	3:39:04 PM	SiCl4 post valve closed
9/3/2010	3:39:04 PM	Main Vac valve closed
9/3/2010	3:39:04 PM	Bypass valve closed
9/3/2010	3:39:04 PM	Bubbler valve closed
9/3/2010	3:39:04 PM	H2 valve opened
9/3/2010	3:39:04 PM	Helium MFC set to  0.000000
9/3/2010	3:39:04 PM	H2 MFC set to  500.000000
9/3/2010	3:39:04 PM	BCl3 MFC set to  0.000000
9/3/2010	3:39:04 PM	PHl3 MFC set to  0.000000
9/3/2010	3:39:04 PM	SiCl4 MFC set to  0.000000
9/3/2010	3:39:04 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	3:39:04 PM	Tube furnace set to 0
9/3/2010	3:40:24 PM	Helium valve closed
9/3/2010	3:40:24 PM	BCl3 valve closed
9/3/2010	3:40:24 PM	PH3 valve closed
9/3/2010	3:40:24 PM	SiCl4 pre valve closed
9/3/2010	3:40:24 PM	SiCl4 post valve closed
9/3/2010	3:40:24 PM	Main Vac valve closed
9/3/2010	3:40:24 PM	Bypass valve closed
9/3/2010	3:40:24 PM	H2 valve opened
9/3/2010	3:40:24 PM	Bubbler valve opened
9/3/2010	3:40:24 PM	Helium MFC set to  0.000000
9/3/2010	3:40:24 PM	H2 MFC set to  500.000000
9/3/2010	3:40:24 PM	BCl3 MFC set to  0.000000
9/3/2010	3:40:24 PM	PHl3 MFC set to  0.000000
9/3/2010	3:40:24 PM	SiCl4 MFC set to  0.000000
9/3/2010	3:40:24 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	3:40:24 PM	Tube furnace set to 1000
9/3/2010	4:00:24 PM	Helium valve closed
9/3/2010	4:00:24 PM	BCl3 valve closed
9/3/2010	4:00:24 PM	PH3 valve closed
9/3/2010	4:00:24 PM	Main Vac valve closed
9/3/2010	4:00:24 PM	Bypass valve closed
9/3/2010	4:00:24 PM	H2 valve opened
9/3/2010	4:00:24 PM	SiCl4 pre valve opened
9/3/2010	4:00:24 PM	SiCl4 post valve opened
9/3/2010	4:00:24 PM	Bubbler valve opened
9/3/2010	4:00:24 PM	Helium MFC set to  0.000000
9/3/2010	4:00:24 PM	H2 MFC set to  500.000000
9/3/2010	4:00:24 PM	BCl3 MFC set to  0.000000
9/3/2010	4:00:24 PM	PHl3 MFC set to  0.000000
9/3/2010	4:00:24 PM	SiCl4 MFC set to  50.000000
9/3/2010	4:00:24 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:00:24 PM	Tube furnace set to 1000
9/3/2010	4:20:24 PM	H2 valve closed
9/3/2010	4:20:24 PM	BCl3 valve closed
9/3/2010	4:20:24 PM	PH3 valve closed
9/3/2010	4:20:24 PM	SiCl4 pre valve closed
9/3/2010	4:20:24 PM	SiCl4 post valve closed
9/3/2010	4:20:24 PM	Main Vac valve closed
9/3/2010	4:20:24 PM	Bypass valve closed
9/3/2010	4:20:24 PM	Helium valve opened
9/3/2010	4:20:24 PM	Bubbler valve opened
9/3/2010	4:20:24 PM	Helium MFC set to  500.000000
9/3/2010	4:20:24 PM	H2 MFC set to  0.000000
9/3/2010	4:20:24 PM	BCl3 MFC set to  0.000000
9/3/2010	4:20:24 PM	PHl3 MFC set to  0.000000
9/3/2010	4:20:24 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:20:24 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:20:25 PM	Tube furnace set to 950
9/3/2010	4:25:25 PM	H2 valve closed
9/3/2010	4:25:25 PM	BCl3 valve closed
9/3/2010	4:25:25 PM	PH3 valve closed
9/3/2010	4:25:25 PM	SiCl4 pre valve closed
9/3/2010	4:25:25 PM	SiCl4 post valve closed
9/3/2010	4:25:25 PM	Main Vac valve closed
9/3/2010	4:25:25 PM	Bypass valve closed
9/3/2010	4:25:25 PM	Helium valve opened
9/3/2010	4:25:25 PM	Bubbler valve opened
9/3/2010	4:25:25 PM	Helium MFC set to  500.000000
9/3/2010	4:25:25 PM	H2 MFC set to  0.000000
9/3/2010	4:25:25 PM	BCl3 MFC set to  0.000000
9/3/2010	4:25:25 PM	PHl3 MFC set to  0.000000
9/3/2010	4:25:25 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:25:25 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:25:25 PM	Tube furnace set to 900
9/3/2010	4:30:25 PM	H2 valve closed
9/3/2010	4:30:25 PM	BCl3 valve closed
9/3/2010	4:30:25 PM	PH3 valve closed
9/3/2010	4:30:25 PM	SiCl4 pre valve closed
9/3/2010	4:30:25 PM	SiCl4 post valve closed
9/3/2010	4:30:25 PM	Main Vac valve closed
9/3/2010	4:30:25 PM	Bypass valve closed
9/3/2010	4:30:25 PM	Helium valve opened
9/3/2010	4:30:25 PM	Bubbler valve opened
9/3/2010	4:30:25 PM	Helium MFC set to  500.000000
9/3/2010	4:30:25 PM	H2 MFC set to  0.000000
9/3/2010	4:30:25 PM	BCl3 MFC set to  0.000000
9/3/2010	4:30:25 PM	PHl3 MFC set to  0.000000
9/3/2010	4:30:25 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:30:25 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:30:25 PM	Tube furnace set to 850
9/3/2010	4:35:25 PM	H2 valve closed
9/3/2010	4:35:25 PM	BCl3 valve closed
9/3/2010	4:35:25 PM	PH3 valve closed
9/3/2010	4:35:25 PM	SiCl4 pre valve closed
9/3/2010	4:35:25 PM	SiCl4 post valve closed
9/3/2010	4:35:25 PM	Main Vac valve closed
9/3/2010	4:35:25 PM	Bypass valve closed
9/3/2010	4:35:25 PM	Helium valve opened
9/3/2010	4:35:25 PM	Bubbler valve opened
9/3/2010	4:35:25 PM	Helium MFC set to  500.000000
9/3/2010	4:35:25 PM	H2 MFC set to  0.000000
9/3/2010	4:35:25 PM	BCl3 MFC set to  0.000000
9/3/2010	4:35:25 PM	PHl3 MFC set to  0.000000
9/3/2010	4:35:25 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:35:25 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:35:25 PM	Tube furnace set to 800
9/3/2010	4:40:25 PM	H2 valve closed
9/3/2010	4:40:25 PM	BCl3 valve closed
9/3/2010	4:40:25 PM	PH3 valve closed
9/3/2010	4:40:25 PM	SiCl4 pre valve closed
9/3/2010	4:40:25 PM	SiCl4 post valve closed
9/3/2010	4:40:25 PM	Main Vac valve closed
9/3/2010	4:40:25 PM	Bypass valve closed
9/3/2010	4:40:25 PM	Helium valve opened
9/3/2010	4:40:25 PM	Bubbler valve opened
9/3/2010	4:40:25 PM	Helium MFC set to  500.000000
9/3/2010	4:40:25 PM	H2 MFC set to  0.000000
9/3/2010	4:40:25 PM	BCl3 MFC set to  0.000000
9/3/2010	4:40:25 PM	PHl3 MFC set to  0.000000
9/3/2010	4:40:25 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:40:25 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:40:25 PM	Tube furnace set to 750
9/3/2010	4:45:26 PM	H2 valve closed
9/3/2010	4:45:26 PM	BCl3 valve closed
9/3/2010	4:45:26 PM	PH3 valve closed
9/3/2010	4:45:26 PM	SiCl4 pre valve closed
9/3/2010	4:45:26 PM	SiCl4 post valve closed
9/3/2010	4:45:26 PM	Main Vac valve closed
9/3/2010	4:45:26 PM	Bypass valve closed
9/3/2010	4:45:26 PM	Helium valve opened
9/3/2010	4:45:26 PM	Bubbler valve opened
9/3/2010	4:45:26 PM	Helium MFC set to  500.000000
9/3/2010	4:45:26 PM	H2 MFC set to  0.000000
9/3/2010	4:45:26 PM	BCl3 MFC set to  0.000000
9/3/2010	4:45:26 PM	PHl3 MFC set to  0.000000
9/3/2010	4:45:26 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:45:26 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:45:26 PM	Tube furnace set to 700
9/3/2010	4:50:26 PM	H2 valve closed
9/3/2010	4:50:26 PM	BCl3 valve closed
9/3/2010	4:50:26 PM	PH3 valve closed
9/3/2010	4:50:26 PM	SiCl4 pre valve closed
9/3/2010	4:50:26 PM	SiCl4 post valve closed
9/3/2010	4:50:26 PM	Main Vac valve closed
9/3/2010	4:50:26 PM	Bypass valve closed
9/3/2010	4:50:26 PM	Helium valve opened
9/3/2010	4:50:26 PM	Bubbler valve opened
9/3/2010	4:50:26 PM	Helium MFC set to  500.000000
9/3/2010	4:50:26 PM	H2 MFC set to  0.000000
9/3/2010	4:50:26 PM	BCl3 MFC set to  0.000000
9/3/2010	4:50:26 PM	PHl3 MFC set to  0.000000
9/3/2010	4:50:26 PM	SiCl4 MFC set to  0.000000
9/3/2010	4:50:26 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	4:50:26 PM	Tube furnace set to 0
9/3/2010	5:10:26 PM	Helium valve closed
9/3/2010	5:10:26 PM	H2 valve closed
9/3/2010	5:10:26 PM	BCl3 valve closed
9/3/2010	5:10:26 PM	PH3 valve closed
9/3/2010	5:10:26 PM	SiCl4 pre valve closed
9/3/2010	5:10:26 PM	SiCl4 post valve closed
9/3/2010	5:10:26 PM	Main Vac valve closed
9/3/2010	5:10:26 PM	Bypass valve closed
9/3/2010	5:10:26 PM	Bubbler valve closed
9/3/2010	5:10:26 PM	Helium MFC set to  0.000000
9/3/2010	5:10:26 PM	H2 MFC set to  0.000000
9/3/2010	5:10:26 PM	BCl3 MFC set to  0.000000
9/3/2010	5:10:26 PM	PHl3 MFC set to  0.000000
9/3/2010	5:10:26 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:10:26 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:10:26 PM	Tube furnace set to 0
9/3/2010	5:10:26 PM	Run finished at 5:10 PM
9/3/2010	5:34:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/3/2010	5:34:04 PM	Recipe started at 5:34 PM
9/3/2010	5:34:04 PM	H2 valve closed
9/3/2010	5:34:04 PM	BCl3 valve closed
9/3/2010	5:34:04 PM	PH3 valve closed
9/3/2010	5:34:04 PM	SiCl4 pre valve closed
9/3/2010	5:34:04 PM	SiCl4 post valve closed
9/3/2010	5:34:04 PM	Main Vac valve closed
9/3/2010	5:34:04 PM	Bypass valve closed
9/3/2010	5:34:04 PM	Bubbler valve closed
9/3/2010	5:34:04 PM	Helium valve opened
9/3/2010	5:34:04 PM	Helium MFC set to  500.000000
9/3/2010	5:34:04 PM	H2 MFC set to  0.000000
9/3/2010	5:34:04 PM	BCl3 MFC set to  0.000000
9/3/2010	5:34:04 PM	PHl3 MFC set to  0.000000
9/3/2010	5:34:04 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:34:04 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:34:04 PM	Tube furnace set to 0
9/3/2010	5:34:05 PM	Helium valve closed
9/3/2010	5:34:05 PM	H2 valve closed
9/3/2010	5:34:05 PM	BCl3 valve closed
9/3/2010	5:34:05 PM	PH3 valve closed
9/3/2010	5:34:05 PM	SiCl4 pre valve closed
9/3/2010	5:34:05 PM	SiCl4 post valve closed
9/3/2010	5:34:05 PM	Main Vac valve closed
9/3/2010	5:34:05 PM	Bypass valve closed
9/3/2010	5:34:05 PM	Bubbler valve closed
9/3/2010	5:34:05 PM	Helium MFC set to  0.000000
9/3/2010	5:34:05 PM	H2 MFC set to  0.000000
9/3/2010	5:34:05 PM	BCl3 MFC set to  0.000000
9/3/2010	5:34:05 PM	PHl3 MFC set to  0.000000
9/3/2010	5:34:05 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:34:05 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:34:05 PM	Tube furnace set to 0
9/3/2010	5:34:05 PM	Run finished at 5:34 PM
9/3/2010	5:34:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/3/2010	5:46:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	5:46:20 PM	Recipe started at 5:46 PM
9/3/2010	5:46:20 PM	Helium valve closed
9/3/2010	5:46:20 PM	H2 valve closed
9/3/2010	5:46:20 PM	BCl3 valve closed
9/3/2010	5:46:20 PM	PH3 valve closed
9/3/2010	5:46:20 PM	SiCl4 pre valve closed
9/3/2010	5:46:20 PM	SiCl4 post valve closed
9/3/2010	5:46:20 PM	Main Vac valve closed
9/3/2010	5:46:20 PM	Bubbler valve closed
9/3/2010	5:46:20 PM	Bypass valve opened
9/3/2010	5:46:20 PM	Helium MFC set to  0.000000
9/3/2010	5:46:20 PM	H2 MFC set to  0.000000
9/3/2010	5:46:20 PM	BCl3 MFC set to  0.000000
9/3/2010	5:46:20 PM	PHl3 MFC set to  0.000000
9/3/2010	5:46:20 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:46:20 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:46:20 PM	Tube furnace set to 0
9/3/2010	5:47:00 PM	Helium valve closed
9/3/2010	5:47:00 PM	H2 valve closed
9/3/2010	5:47:00 PM	BCl3 valve closed
9/3/2010	5:47:00 PM	PH3 valve closed
9/3/2010	5:47:00 PM	SiCl4 pre valve closed
9/3/2010	5:47:00 PM	SiCl4 post valve closed
9/3/2010	5:47:00 PM	Bubbler valve closed
9/3/2010	5:47:00 PM	Main Vac valve opened
9/3/2010	5:47:00 PM	Bypass valve opened
9/3/2010	5:47:00 PM	Helium MFC set to  0.000000
9/3/2010	5:47:00 PM	H2 MFC set to  0.000000
9/3/2010	5:47:00 PM	BCl3 MFC set to  0.000000
9/3/2010	5:47:00 PM	PHl3 MFC set to  0.000000
9/3/2010	5:47:00 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:47:00 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:47:00 PM	Tube furnace set to 0
9/3/2010	5:47:00 PM	Run finished at 5:47 PM
9/3/2010	5:47:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	5:47:39 PM	Recipe started at 5:47 PM
9/3/2010	5:47:39 PM	Helium valve closed
9/3/2010	5:47:39 PM	H2 valve closed
9/3/2010	5:47:39 PM	BCl3 valve closed
9/3/2010	5:47:39 PM	PH3 valve closed
9/3/2010	5:47:39 PM	SiCl4 pre valve closed
9/3/2010	5:47:39 PM	SiCl4 post valve closed
9/3/2010	5:47:39 PM	Main Vac valve closed
9/3/2010	5:47:39 PM	Bubbler valve closed
9/3/2010	5:47:39 PM	Bypass valve opened
9/3/2010	5:47:39 PM	Helium MFC set to  0.000000
9/3/2010	5:47:39 PM	H2 MFC set to  0.000000
9/3/2010	5:47:39 PM	BCl3 MFC set to  0.000000
9/3/2010	5:47:39 PM	PHl3 MFC set to  0.000000
9/3/2010	5:47:39 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:47:39 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:47:39 PM	Tube furnace set to 100
9/3/2010	5:47:39 PM	Helium valve closed
9/3/2010	5:47:39 PM	H2 valve closed
9/3/2010	5:47:39 PM	BCl3 valve closed
9/3/2010	5:47:39 PM	PH3 valve closed
9/3/2010	5:47:39 PM	SiCl4 pre valve closed
9/3/2010	5:47:39 PM	SiCl4 post valve closed
9/3/2010	5:47:39 PM	Bubbler valve closed
9/3/2010	5:47:39 PM	Main Vac valve opened
9/3/2010	5:47:39 PM	Bypass valve opened
9/3/2010	5:47:39 PM	Helium MFC set to  0.000000
9/3/2010	5:47:39 PM	H2 MFC set to  0.000000
9/3/2010	5:47:39 PM	BCl3 MFC set to  0.000000
9/3/2010	5:47:39 PM	PHl3 MFC set to  0.000000
9/3/2010	5:47:39 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:47:39 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:47:39 PM	Tube furnace set to 100
9/3/2010	5:47:57 PM	H2 valve closed
9/3/2010	5:47:57 PM	BCl3 valve closed
9/3/2010	5:47:57 PM	PH3 valve closed
9/3/2010	5:47:57 PM	SiCl4 pre valve closed
9/3/2010	5:47:57 PM	SiCl4 post valve closed
9/3/2010	5:47:57 PM	Bubbler valve closed
9/3/2010	5:47:57 PM	Helium valve opened
9/3/2010	5:47:57 PM	Main Vac valve opened
9/3/2010	5:47:57 PM	Bypass valve opened
9/3/2010	5:47:57 PM	Helium MFC set to  100.000000
9/3/2010	5:47:57 PM	H2 MFC set to  0.000000
9/3/2010	5:47:57 PM	BCl3 MFC set to  0.000000
9/3/2010	5:47:57 PM	PHl3 MFC set to  0.000000
9/3/2010	5:47:57 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:47:57 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:47:57 PM	Tube furnace set to 100
9/3/2010	5:55:06 PM	Helium valve closed
9/3/2010	5:55:06 PM	H2 valve closed
9/3/2010	5:55:06 PM	BCl3 valve closed
9/3/2010	5:55:06 PM	PH3 valve closed
9/3/2010	5:55:06 PM	SiCl4 pre valve closed
9/3/2010	5:55:06 PM	SiCl4 post valve closed
9/3/2010	5:55:06 PM	Bubbler valve closed
9/3/2010	5:55:06 PM	Main Vac valve opened
9/3/2010	5:55:06 PM	Bypass valve opened
9/3/2010	5:55:06 PM	Helium MFC set to  0.000000
9/3/2010	5:55:06 PM	H2 MFC set to  0.000000
9/3/2010	5:55:06 PM	BCl3 MFC set to  0.000000
9/3/2010	5:55:06 PM	PHl3 MFC set to  0.000000
9/3/2010	5:55:06 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:55:06 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:55:06 PM	Tube furnace set to 100
9/3/2010	5:55:42 PM	Run aborted at 5:55 PM
9/3/2010	5:55:42 PM	Helium valve closed
9/3/2010	5:55:42 PM	H2 valve closed
9/3/2010	5:55:42 PM	BCl3 valve closed
9/3/2010	5:55:42 PM	PH3 valve closed
9/3/2010	5:55:42 PM	SiCl4 pre valve closed
9/3/2010	5:55:42 PM	SiCl4 post valve closed
9/3/2010	5:55:42 PM	Bypass valve closed
9/3/2010	5:55:42 PM	Main Vac valve closed
9/3/2010	5:55:42 PM	Bubbler valve closed
9/3/2010	5:55:42 PM	Helium MFC set to  0.000000
9/3/2010	5:55:42 PM	H2 MFC set to  0.000000
9/3/2010	5:55:42 PM	BCl3 MFC set to  0.000000
9/3/2010	5:55:42 PM	PHl3 MFC set to  0.000000
9/3/2010	5:55:42 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:55:42 PM	Tube furnace set to 0
9/3/2010	5:55:50 PM	Recipe started at 5:55 PM
9/3/2010	5:55:50 PM	Helium valve closed
9/3/2010	5:55:50 PM	H2 valve closed
9/3/2010	5:55:50 PM	BCl3 valve closed
9/3/2010	5:55:50 PM	PH3 valve closed
9/3/2010	5:55:50 PM	SiCl4 pre valve closed
9/3/2010	5:55:50 PM	SiCl4 post valve closed
9/3/2010	5:55:50 PM	Main Vac valve closed
9/3/2010	5:55:50 PM	Bubbler valve closed
9/3/2010	5:55:50 PM	Bypass valve opened
9/3/2010	5:55:50 PM	Helium MFC set to  0.000000
9/3/2010	5:55:50 PM	H2 MFC set to  0.000000
9/3/2010	5:55:50 PM	BCl3 MFC set to  0.000000
9/3/2010	5:55:50 PM	PHl3 MFC set to  0.000000
9/3/2010	5:55:50 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:55:50 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:55:50 PM	Tube furnace set to 100
9/3/2010	5:55:51 PM	Helium valve closed
9/3/2010	5:55:51 PM	H2 valve closed
9/3/2010	5:55:51 PM	BCl3 valve closed
9/3/2010	5:55:51 PM	PH3 valve closed
9/3/2010	5:55:51 PM	SiCl4 pre valve closed
9/3/2010	5:55:51 PM	SiCl4 post valve closed
9/3/2010	5:55:51 PM	Bubbler valve closed
9/3/2010	5:55:51 PM	Main Vac valve opened
9/3/2010	5:55:51 PM	Bypass valve opened
9/3/2010	5:55:51 PM	Helium MFC set to  0.000000
9/3/2010	5:55:51 PM	H2 MFC set to  0.000000
9/3/2010	5:55:51 PM	BCl3 MFC set to  0.000000
9/3/2010	5:55:51 PM	PHl3 MFC set to  0.000000
9/3/2010	5:55:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:55:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:55:51 PM	Tube furnace set to 100
9/3/2010	5:56:51 PM	H2 valve closed
9/3/2010	5:56:51 PM	BCl3 valve closed
9/3/2010	5:56:51 PM	PH3 valve closed
9/3/2010	5:56:51 PM	SiCl4 pre valve closed
9/3/2010	5:56:51 PM	SiCl4 post valve closed
9/3/2010	5:56:51 PM	Bubbler valve closed
9/3/2010	5:56:51 PM	Helium valve opened
9/3/2010	5:56:51 PM	Main Vac valve opened
9/3/2010	5:56:51 PM	Bypass valve opened
9/3/2010	5:56:51 PM	Helium MFC set to  100.000000
9/3/2010	5:56:51 PM	H2 MFC set to  0.000000
9/3/2010	5:56:51 PM	BCl3 MFC set to  0.000000
9/3/2010	5:56:51 PM	PHl3 MFC set to  0.000000
9/3/2010	5:56:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	5:56:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	5:56:51 PM	Tube furnace set to 100
9/3/2010	6:05:51 PM	Helium valve closed
9/3/2010	6:05:51 PM	H2 valve closed
9/3/2010	6:05:51 PM	BCl3 valve closed
9/3/2010	6:05:51 PM	PH3 valve closed
9/3/2010	6:05:51 PM	SiCl4 pre valve closed
9/3/2010	6:05:51 PM	SiCl4 post valve closed
9/3/2010	6:05:51 PM	Bubbler valve closed
9/3/2010	6:05:51 PM	Main Vac valve opened
9/3/2010	6:05:51 PM	Bypass valve opened
9/3/2010	6:05:51 PM	Helium MFC set to  0.000000
9/3/2010	6:05:51 PM	H2 MFC set to  0.000000
9/3/2010	6:05:51 PM	BCl3 MFC set to  0.000000
9/3/2010	6:05:51 PM	PHl3 MFC set to  0.000000
9/3/2010	6:05:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	6:05:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	6:05:51 PM	Tube furnace set to 100
9/3/2010	6:06:51 PM	H2 valve closed
9/3/2010	6:06:51 PM	BCl3 valve closed
9/3/2010	6:06:51 PM	PH3 valve closed
9/3/2010	6:06:51 PM	SiCl4 pre valve closed
9/3/2010	6:06:51 PM	SiCl4 post valve closed
9/3/2010	6:06:51 PM	Bubbler valve closed
9/3/2010	6:06:51 PM	Helium valve opened
9/3/2010	6:06:51 PM	Main Vac valve opened
9/3/2010	6:06:51 PM	Bypass valve opened
9/3/2010	6:06:51 PM	Helium MFC set to  100.000000
9/3/2010	6:06:51 PM	H2 MFC set to  0.000000
9/3/2010	6:06:51 PM	BCl3 MFC set to  0.000000
9/3/2010	6:06:51 PM	PHl3 MFC set to  0.000000
9/3/2010	6:06:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	6:06:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	6:06:51 PM	Tube furnace set to 100
9/3/2010	6:15:51 PM	Helium valve closed
9/3/2010	6:15:51 PM	H2 valve closed
9/3/2010	6:15:51 PM	BCl3 valve closed
9/3/2010	6:15:51 PM	PH3 valve closed
9/3/2010	6:15:51 PM	SiCl4 pre valve closed
9/3/2010	6:15:51 PM	SiCl4 post valve closed
9/3/2010	6:15:51 PM	Bubbler valve closed
9/3/2010	6:15:51 PM	Main Vac valve opened
9/3/2010	6:15:51 PM	Bypass valve opened
9/3/2010	6:15:51 PM	Helium MFC set to  0.000000
9/3/2010	6:15:51 PM	H2 MFC set to  0.000000
9/3/2010	6:15:51 PM	BCl3 MFC set to  0.000000
9/3/2010	6:15:51 PM	PHl3 MFC set to  0.000000
9/3/2010	6:15:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	6:15:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	6:15:51 PM	Tube furnace set to 100
9/3/2010	6:16:52 PM	H2 valve closed
9/3/2010	6:16:52 PM	BCl3 valve closed
9/3/2010	6:16:52 PM	PH3 valve closed
9/3/2010	6:16:52 PM	SiCl4 pre valve closed
9/3/2010	6:16:52 PM	SiCl4 post valve closed
9/3/2010	6:16:52 PM	Bubbler valve closed
9/3/2010	6:16:52 PM	Helium valve opened
9/3/2010	6:16:52 PM	Main Vac valve opened
9/3/2010	6:16:52 PM	Bypass valve opened
9/3/2010	6:16:52 PM	Helium MFC set to  100.000000
9/3/2010	6:16:52 PM	H2 MFC set to  0.000000
9/3/2010	6:16:52 PM	BCl3 MFC set to  0.000000
9/3/2010	6:16:52 PM	PHl3 MFC set to  0.000000
9/3/2010	6:16:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	6:16:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	6:16:52 PM	Tube furnace set to 100
9/3/2010	6:25:52 PM	Helium valve closed
9/3/2010	6:25:52 PM	H2 valve closed
9/3/2010	6:25:52 PM	BCl3 valve closed
9/3/2010	6:25:52 PM	PH3 valve closed
9/3/2010	6:25:52 PM	SiCl4 pre valve closed
9/3/2010	6:25:52 PM	SiCl4 post valve closed
9/3/2010	6:25:52 PM	Bubbler valve closed
9/3/2010	6:25:52 PM	Main Vac valve opened
9/3/2010	6:25:52 PM	Bypass valve opened
9/3/2010	6:25:52 PM	Helium MFC set to  0.000000
9/3/2010	6:25:52 PM	H2 MFC set to  0.000000
9/3/2010	6:25:52 PM	BCl3 MFC set to  0.000000
9/3/2010	6:25:52 PM	PHl3 MFC set to  0.000000
9/3/2010	6:25:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	6:25:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	6:25:52 PM	Tube furnace set to 100
9/3/2010	6:25:53 PM	Run finished at 6:25 PM
9/3/2010	7:17:47 PM	Helium valve opened
9/3/2010	7:17:49 PM	Helium MFC set to  100.000000
9/3/2010	7:18:07 PM	Helium valve closed
9/3/2010	7:18:56 PM	Bypass valve closed
9/3/2010	7:18:57 PM	Main Vac valve closed
9/3/2010	7:19:15 PM	Main Vac valve opened
9/3/2010	7:19:16 PM	Bypass valve opened
9/3/2010	7:19:18 PM	Helium valve opened
9/3/2010	7:20:16 PM	Helium valve closed
9/3/2010	7:21:31 PM	Recipe started at 7:21 PM
9/3/2010	7:21:31 PM	Helium valve closed
9/3/2010	7:21:31 PM	BCl3 valve closed
9/3/2010	7:21:31 PM	PH3 valve closed
9/3/2010	7:21:31 PM	SiCl4 pre valve closed
9/3/2010	7:21:31 PM	SiCl4 post valve closed
9/3/2010	7:21:31 PM	Main Vac valve closed
9/3/2010	7:21:31 PM	Bypass valve closed
9/3/2010	7:21:31 PM	Bubbler valve closed
9/3/2010	7:21:31 PM	H2 valve opened
9/3/2010	7:21:31 PM	Helium MFC set to  0.000000
9/3/2010	7:21:31 PM	H2 MFC set to  500.000000
9/3/2010	7:21:31 PM	BCl3 MFC set to  0.000000
9/3/2010	7:21:31 PM	PHl3 MFC set to  0.000000
9/3/2010	7:21:31 PM	SiCl4 MFC set to  0.000000
9/3/2010	7:21:31 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	7:21:32 PM	Tube furnace set to 0
9/3/2010	7:22:51 PM	Helium valve closed
9/3/2010	7:22:51 PM	BCl3 valve closed
9/3/2010	7:22:51 PM	PH3 valve closed
9/3/2010	7:22:51 PM	SiCl4 pre valve closed
9/3/2010	7:22:51 PM	SiCl4 post valve closed
9/3/2010	7:22:51 PM	Main Vac valve closed
9/3/2010	7:22:51 PM	Bypass valve closed
9/3/2010	7:22:51 PM	H2 valve opened
9/3/2010	7:22:51 PM	Bubbler valve opened
9/3/2010	7:22:51 PM	Helium MFC set to  0.000000
9/3/2010	7:22:51 PM	H2 MFC set to  500.000000
9/3/2010	7:22:51 PM	BCl3 MFC set to  0.000000
9/3/2010	7:22:51 PM	PHl3 MFC set to  0.000000
9/3/2010	7:22:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	7:22:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	7:22:51 PM	Tube furnace set to 1000
9/3/2010	7:42:51 PM	Helium valve closed
9/3/2010	7:42:51 PM	BCl3 valve closed
9/3/2010	7:42:51 PM	PH3 valve closed
9/3/2010	7:42:51 PM	Main Vac valve closed
9/3/2010	7:42:51 PM	Bypass valve closed
9/3/2010	7:42:51 PM	H2 valve opened
9/3/2010	7:42:51 PM	SiCl4 pre valve opened
9/3/2010	7:42:51 PM	SiCl4 post valve opened
9/3/2010	7:42:51 PM	Bubbler valve opened
9/3/2010	7:42:51 PM	Helium MFC set to  0.000000
9/3/2010	7:42:51 PM	H2 MFC set to  500.000000
9/3/2010	7:42:51 PM	BCl3 MFC set to  0.000000
9/3/2010	7:42:51 PM	PHl3 MFC set to  0.000000
9/3/2010	7:42:51 PM	SiCl4 MFC set to  50.000000
9/3/2010	7:42:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	7:42:51 PM	Tube furnace set to 1000
9/3/2010	8:02:51 PM	H2 valve closed
9/3/2010	8:02:51 PM	BCl3 valve closed
9/3/2010	8:02:51 PM	PH3 valve closed
9/3/2010	8:02:51 PM	SiCl4 pre valve closed
9/3/2010	8:02:51 PM	SiCl4 post valve closed
9/3/2010	8:02:51 PM	Main Vac valve closed
9/3/2010	8:02:51 PM	Bypass valve closed
9/3/2010	8:02:51 PM	Helium valve opened
9/3/2010	8:02:51 PM	Bubbler valve opened
9/3/2010	8:02:51 PM	Helium MFC set to  500.000000
9/3/2010	8:02:51 PM	H2 MFC set to  0.000000
9/3/2010	8:02:51 PM	BCl3 MFC set to  0.000000
9/3/2010	8:02:51 PM	PHl3 MFC set to  0.000000
9/3/2010	8:02:51 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:02:51 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:02:52 PM	Tube furnace set to 950
9/3/2010	8:07:52 PM	H2 valve closed
9/3/2010	8:07:52 PM	BCl3 valve closed
9/3/2010	8:07:52 PM	PH3 valve closed
9/3/2010	8:07:52 PM	SiCl4 pre valve closed
9/3/2010	8:07:52 PM	SiCl4 post valve closed
9/3/2010	8:07:52 PM	Main Vac valve closed
9/3/2010	8:07:52 PM	Bypass valve closed
9/3/2010	8:07:52 PM	Helium valve opened
9/3/2010	8:07:52 PM	Bubbler valve opened
9/3/2010	8:07:52 PM	Helium MFC set to  500.000000
9/3/2010	8:07:52 PM	H2 MFC set to  0.000000
9/3/2010	8:07:52 PM	BCl3 MFC set to  0.000000
9/3/2010	8:07:52 PM	PHl3 MFC set to  0.000000
9/3/2010	8:07:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:07:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:07:52 PM	Tube furnace set to 900
9/3/2010	8:12:52 PM	H2 valve closed
9/3/2010	8:12:52 PM	BCl3 valve closed
9/3/2010	8:12:52 PM	PH3 valve closed
9/3/2010	8:12:52 PM	SiCl4 pre valve closed
9/3/2010	8:12:52 PM	SiCl4 post valve closed
9/3/2010	8:12:52 PM	Main Vac valve closed
9/3/2010	8:12:52 PM	Bypass valve closed
9/3/2010	8:12:52 PM	Helium valve opened
9/3/2010	8:12:52 PM	Bubbler valve opened
9/3/2010	8:12:52 PM	Helium MFC set to  500.000000
9/3/2010	8:12:52 PM	H2 MFC set to  0.000000
9/3/2010	8:12:52 PM	BCl3 MFC set to  0.000000
9/3/2010	8:12:52 PM	PHl3 MFC set to  0.000000
9/3/2010	8:12:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:12:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:12:52 PM	Tube furnace set to 850
9/3/2010	8:17:52 PM	H2 valve closed
9/3/2010	8:17:52 PM	BCl3 valve closed
9/3/2010	8:17:52 PM	PH3 valve closed
9/3/2010	8:17:52 PM	SiCl4 pre valve closed
9/3/2010	8:17:52 PM	SiCl4 post valve closed
9/3/2010	8:17:52 PM	Main Vac valve closed
9/3/2010	8:17:52 PM	Bypass valve closed
9/3/2010	8:17:52 PM	Helium valve opened
9/3/2010	8:17:52 PM	Bubbler valve opened
9/3/2010	8:17:52 PM	Helium MFC set to  500.000000
9/3/2010	8:17:52 PM	H2 MFC set to  0.000000
9/3/2010	8:17:52 PM	BCl3 MFC set to  0.000000
9/3/2010	8:17:52 PM	PHl3 MFC set to  0.000000
9/3/2010	8:17:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:17:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:17:52 PM	Tube furnace set to 800
9/3/2010	8:22:52 PM	H2 valve closed
9/3/2010	8:22:52 PM	BCl3 valve closed
9/3/2010	8:22:52 PM	PH3 valve closed
9/3/2010	8:22:52 PM	SiCl4 pre valve closed
9/3/2010	8:22:52 PM	SiCl4 post valve closed
9/3/2010	8:22:52 PM	Main Vac valve closed
9/3/2010	8:22:52 PM	Bypass valve closed
9/3/2010	8:22:52 PM	Helium valve opened
9/3/2010	8:22:52 PM	Bubbler valve opened
9/3/2010	8:22:52 PM	Helium MFC set to  500.000000
9/3/2010	8:22:52 PM	H2 MFC set to  0.000000
9/3/2010	8:22:52 PM	BCl3 MFC set to  0.000000
9/3/2010	8:22:52 PM	PHl3 MFC set to  0.000000
9/3/2010	8:22:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:22:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:22:52 PM	Tube furnace set to 750
9/3/2010	8:27:52 PM	H2 valve closed
9/3/2010	8:27:52 PM	BCl3 valve closed
9/3/2010	8:27:52 PM	PH3 valve closed
9/3/2010	8:27:52 PM	SiCl4 pre valve closed
9/3/2010	8:27:52 PM	SiCl4 post valve closed
9/3/2010	8:27:52 PM	Main Vac valve closed
9/3/2010	8:27:52 PM	Bypass valve closed
9/3/2010	8:27:52 PM	Helium valve opened
9/3/2010	8:27:52 PM	Bubbler valve opened
9/3/2010	8:27:52 PM	Helium MFC set to  500.000000
9/3/2010	8:27:52 PM	H2 MFC set to  0.000000
9/3/2010	8:27:52 PM	BCl3 MFC set to  0.000000
9/3/2010	8:27:52 PM	PHl3 MFC set to  0.000000
9/3/2010	8:27:52 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:27:52 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:27:53 PM	Tube furnace set to 700
9/3/2010	8:32:53 PM	H2 valve closed
9/3/2010	8:32:53 PM	BCl3 valve closed
9/3/2010	8:32:53 PM	PH3 valve closed
9/3/2010	8:32:53 PM	SiCl4 pre valve closed
9/3/2010	8:32:53 PM	SiCl4 post valve closed
9/3/2010	8:32:53 PM	Main Vac valve closed
9/3/2010	8:32:53 PM	Bypass valve closed
9/3/2010	8:32:53 PM	Helium valve opened
9/3/2010	8:32:53 PM	Bubbler valve opened
9/3/2010	8:32:53 PM	Helium MFC set to  500.000000
9/3/2010	8:32:53 PM	H2 MFC set to  0.000000
9/3/2010	8:32:53 PM	BCl3 MFC set to  0.000000
9/3/2010	8:32:53 PM	PHl3 MFC set to  0.000000
9/3/2010	8:32:53 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:32:53 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:32:53 PM	Tube furnace set to 0
9/3/2010	8:52:53 PM	Helium valve closed
9/3/2010	8:52:53 PM	H2 valve closed
9/3/2010	8:52:53 PM	BCl3 valve closed
9/3/2010	8:52:53 PM	PH3 valve closed
9/3/2010	8:52:53 PM	SiCl4 pre valve closed
9/3/2010	8:52:53 PM	SiCl4 post valve closed
9/3/2010	8:52:53 PM	Main Vac valve closed
9/3/2010	8:52:53 PM	Bypass valve closed
9/3/2010	8:52:53 PM	Bubbler valve closed
9/3/2010	8:52:53 PM	Helium MFC set to  0.000000
9/3/2010	8:52:53 PM	H2 MFC set to  0.000000
9/3/2010	8:52:53 PM	BCl3 MFC set to  0.000000
9/3/2010	8:52:53 PM	PHl3 MFC set to  0.000000
9/3/2010	8:52:53 PM	SiCl4 MFC set to  0.000000
9/3/2010	8:52:53 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	8:52:53 PM	Tube furnace set to 0
9/3/2010	8:52:53 PM	Run finished at 8:52 PM
9/3/2010	9:17:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/3/2010	9:17:20 PM	Recipe started at 9:17 PM
9/3/2010	9:17:20 PM	H2 valve closed
9/3/2010	9:17:20 PM	BCl3 valve closed
9/3/2010	9:17:20 PM	PH3 valve closed
9/3/2010	9:17:20 PM	SiCl4 pre valve closed
9/3/2010	9:17:20 PM	SiCl4 post valve closed
9/3/2010	9:17:20 PM	Main Vac valve closed
9/3/2010	9:17:20 PM	Bypass valve closed
9/3/2010	9:17:20 PM	Bubbler valve closed
9/3/2010	9:17:20 PM	Helium valve opened
9/3/2010	9:17:20 PM	Helium MFC set to  500.000000
9/3/2010	9:17:20 PM	H2 MFC set to  0.000000
9/3/2010	9:17:20 PM	BCl3 MFC set to  0.000000
9/3/2010	9:17:20 PM	PHl3 MFC set to  0.000000
9/3/2010	9:17:20 PM	SiCl4 MFC set to  0.000000
9/3/2010	9:17:20 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	9:17:20 PM	Tube furnace set to 0
9/3/2010	9:17:21 PM	Helium valve closed
9/3/2010	9:17:21 PM	H2 valve closed
9/3/2010	9:17:21 PM	BCl3 valve closed
9/3/2010	9:17:21 PM	PH3 valve closed
9/3/2010	9:17:21 PM	SiCl4 pre valve closed
9/3/2010	9:17:21 PM	SiCl4 post valve closed
9/3/2010	9:17:21 PM	Main Vac valve closed
9/3/2010	9:17:21 PM	Bypass valve closed
9/3/2010	9:17:21 PM	Bubbler valve closed
9/3/2010	9:17:21 PM	Helium MFC set to  0.000000
9/3/2010	9:17:21 PM	H2 MFC set to  0.000000
9/3/2010	9:17:21 PM	BCl3 MFC set to  0.000000
9/3/2010	9:17:21 PM	PHl3 MFC set to  0.000000
9/3/2010	9:17:21 PM	SiCl4 MFC set to  0.000000
9/3/2010	9:17:21 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	9:17:21 PM	Tube furnace set to 0
9/3/2010	9:17:21 PM	Run finished at 9:17 PM
9/3/2010	9:17:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/3/2010	9:21:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/3/2010	9:21:09 PM	Recipe started at 9:21 PM
9/3/2010	9:21:09 PM	Helium valve closed
9/3/2010	9:21:09 PM	H2 valve closed
9/3/2010	9:21:09 PM	BCl3 valve closed
9/3/2010	9:21:09 PM	PH3 valve closed
9/3/2010	9:21:09 PM	SiCl4 pre valve closed
9/3/2010	9:21:09 PM	SiCl4 post valve closed
9/3/2010	9:21:09 PM	Main Vac valve closed
9/3/2010	9:21:09 PM	Bubbler valve closed
9/3/2010	9:21:09 PM	Bypass valve opened
9/3/2010	9:21:09 PM	Helium MFC set to  0.000000
9/3/2010	9:21:09 PM	H2 MFC set to  0.000000
9/3/2010	9:21:09 PM	BCl3 MFC set to  0.000000
9/3/2010	9:21:09 PM	PHl3 MFC set to  0.000000
9/3/2010	9:21:09 PM	SiCl4 MFC set to  0.000000
9/3/2010	9:21:09 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	9:21:09 PM	Tube furnace set to 0
9/3/2010	9:21:48 PM	Helium valve closed
9/3/2010	9:21:48 PM	H2 valve closed
9/3/2010	9:21:48 PM	BCl3 valve closed
9/3/2010	9:21:48 PM	PH3 valve closed
9/3/2010	9:21:48 PM	SiCl4 pre valve closed
9/3/2010	9:21:48 PM	SiCl4 post valve closed
9/3/2010	9:21:48 PM	Bubbler valve closed
9/3/2010	9:21:48 PM	Main Vac valve opened
9/3/2010	9:21:48 PM	Bypass valve opened
9/3/2010	9:21:48 PM	Helium MFC set to  0.000000
9/3/2010	9:21:48 PM	H2 MFC set to  0.000000
9/3/2010	9:21:48 PM	BCl3 MFC set to  0.000000
9/3/2010	9:21:48 PM	PHl3 MFC set to  0.000000
9/3/2010	9:21:48 PM	SiCl4 MFC set to  0.000000
9/3/2010	9:21:48 PM	Bypass solenoid MFC set to  0.000000
9/3/2010	9:21:48 PM	Tube furnace set to 0
9/3/2010	9:21:48 PM	Run finished at 9:21 PM
9/3/2010	9:21:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
